Electronmicroprobe (EMP) or Electron-Probe-Micro-Analyser (EPMA)
The electron microprobe allows to determine the chemical composition of polished samples, in-situ and non-destructively.
The microprobe is able to quantitatively measure the abundance of all elements from C to U using five wavelength-dispersive spectrometers (WDS) and an energy-dispersive X-ray spectrometer (EDX) for rapid analyses. This analytical technique combines micron-scale chemical analyses with scanning electron microscopy and is capable of large- and small-scale element mapping of specimens. The microprobe is equipped with a cathodoluminescence-, secondary electron- and backscattered electron-detector and a pointlogger system.