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Electron microprobe analyser (EMPA)

Electron microprobe analyser
Photo: Inst. for Geosciences

Electronmicroprobe (EMP) or Electron-Probe-Micro-Analyser (EPMA)

The electron microprobe allows to determine the chemical composition of polished samples, in-situ and non-destructively.

The microprobe is able to quantitatively measure the abundance of all elements from C to U using five wavelength-dispersive spectrometers (WDS) and an energy-dispersive X-ray spectrometer (EDX) for rapid analyses. This analytical technique combines micron-scale chemical analyses with scanning electron microscopy and is capable of large- and small-scale element mapping of specimens. The microprobe is equipped with a cathodoluminescence-, secondary electron- and backscattered electron-detector and a pointlogger system.


  • JEOL JXA-8200 Electronmicroprobe (W-Filament, up to 30 kV)
  • EDXS-detector
  • Cathodoluminescence (CL) detector
  • Secondary electron (SEE) and backscattered electron (BSE) detector
  • Sample holder for 3 polished thin sections (48 × 28 mm)
  • Sample holder for 6 polished mounts (1 inch in diameter)
  • Sample holder for 2 polished thick sections (75 × 26 mm)
  • Optical microscope for reflected or transmitted light
  • Pointlogger for navigation
Electron microprobe analyser
Photo: Inst. for Geosciences



Institute of Geosciences
Campus Golm
Karl-Liebknecht-Str. 24-25
14476 Potsdam-Golm
Building 27, Room 0.40